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LT-019410 / first seen 2026-09-08 21:46 / last activity 47d ago solid / under-covered

Silicon photonic MEMS platform-based air-coupled optomechanical ultrasound receiver at 2.8 MHz with an ultra-compact active acoustic sensing area

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primary source

title
Silicon photonic MEMS platform-based air-coupled optomechanical ultrasound receiver at 2.8 MHz with an ultra-compact active acoustic sensing area
venue
status
peer-reviewed
doi
10.1364/prj.597287
published
2026-08-07